The P-6 Tencor Surface Profiler offers a combination of advanced features for process development and manufacturing control of scientific research, photovoltaic solar manufacturing, data storage, MEMS, opto-electronics, and other industrial metrology applications.  The P-6 stylus profiler and surface analysis system utilizes numerous platform and measurement technologies from KLA-Tencor's most advanced semiconductor profiler systems for surface topography analysis.  It has a programmable scan stage, low noise, and high quality, high resolution long scans.  It is a smaller, more economical design for substrates up to 150mm.

Key Features:

• 150mm scan length without stitching and 1 mm Z range
• Capacitive sensor-LVDC with a sub-Angstrom resolution
• Step height repeatability of 6Å
• Stylus force: 0.5-50mg (constant stylus force during scan)
• 4.0X, 0.12NA Top view objective lens
• Stylus 2.0µm 60 degree radius
• Vibration isolation table
• Vacuum sample hold-down
• Thin and thick film step height
• Photo resist/soft films
• 3D imaging
• 2D stress analysis with locator
• Defect review and defect analysis
• Flatness or curvature
• Etched trench depth
• Materials characterization for surface roughness and waviness

Specifications:

• 150mm scan length without stitching
• Low noise, high resolution
• 3D imaging