The Brooks Instruments 5850E Series Mass Flow Controller was designed to measure and control gas flows. It features fast flow, removable sensor, negligible flow undershot/ overshoot and much more. The Brooks Instruments mass flow controller eliminates the need to continuous monitoring or readjustments of gas pressures to provide a stable gas flow.
- Electrical Requirements:
N.C. Valve (or N.O. Valve with flow £2.5 slpm)
3.5 watts, +15 Vdc @ 35 mA, -15Vdc @ 180 mA
N.O. Valve with flow rate > 2.5 slpm:
10.5 watts, +15 Vdc @ 350 mA, -15 Vdc @ 350 mA
- Repeatability: 0.25% of rate
- Control Range: 50 to 1
- Sensitivity to Mounting Attitude: ±0.5% F.S. maximum deviation from specified accuracy after rezeroing.
- Temperature Sensitivity:
Zero: Less than ±0.075% F.S. per degree C
Span: Less than ±1.0% F.S. shift from original calibration
over 10-50°C range (50-122°F)
- Pressure Sensitivity: ±0.03% per psi up to 200 psig (N2)
- Command Input Voltage: 0 to 5 Vdc (200 K ohms input resistance)