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The Edwards TurboMolecular Pump Model EXT250H Code B740-03-000 is a compound vacuum pump that combines a tubromolecular pump and a drag pump on a single shaft. The turbomolecular pump is made from a multi-stage axial-flow turbine which is optimized for operation in molecular flow conditions. The drag pump is made from pumping channels formed by plane rotating disks. The drag pump is designed for operation at higher pressures than conventional turbomolecular pumps. Additionally, when purged with an inert gas, the EXT250H can be used to pump oxygen in concentrations above 20% by volume.

Specifications:

• Vent gas: Dry air, nitrogen, argon or other inert gases
• Maximum dew point at atmospheric pressure: -22°C
• Maximum size of particulates: 1 µm
• Maximum concentration of oil: 0.1 parts per million
• Purge gas: Dry nitrogen, argon or other inert gases
• Allowable purge gas flow (when required): 20 to 100 sccm (0.33 to 1.67 mbar l s^-1)
• Recommended purge gas flow: 25 sccm (0.42 mbar l s-1)
• Maximum allowable purge gas supply pressure: 2 bar (gauge); 29 psig, 3 x 10⁵ Pa
• Maximum water pressure: 5 bar (gauge), 73.5 psig, 6 x 10⁵ Pa