Brooks Instrument Division 5850E Series Mass Flow Controller

The Brooks Instruments 5850E Series Mass Flow Controller was designed to measure and control gas flows. It features fast flow, removable sensor, negligible flow undershot/ overshoot and much more. The Brooks Instruments mass flow controller eliminates the need to continuous monitoring or readjustments of gas pressures to provide a stable gas flow.

Specifications:
– Electrical Requirements:
N.C. Valve (or N.O. Valve with flow £2.5 slpm)
3.5 watts, +15 Vdc @ 35 mA, -15Vdc @ 180 mA
N.O. Valve with flow rate > 2.5 slpm:
10.5 watts, +15 Vdc @ 350 mA, -15 Vdc @ 350 mA
– Repeatability: 0.25% of rate
– Control Range: 50 to 1
– Sensitivity to Mounting Attitude: ±0.5% F.S. maximum deviation from specified accuracy after rezeroing.
– Temperature Sensitivity:
Zero: Less than ±0.075% F.S. per degree C
Span: Less than ±1.0% F.S. shift from original calibration
over 10-50°C range (50-122°F)
– Pressure Sensitivity: ±0.03% per psi up to 200 psig (N2)
– Command Input Voltage: 0 to 5 Vdc (200 K ohms input resistance)